Lab Tour

The NanoFabrication Laboratory

at Chalmers University of Technology, Gothenburg, Thursday 29 June, 15:20-17:15

The NanoFabrication Laboratory is run by the Department of Microtechnology and Nanoscience at Chalmers, but is an open user facility for external as well as internal academic and industrial interests. The Nanofabrication Laboratory offers a broad platform of more than 200 process tools for the development and testing of new ideas in micro and nanotechnology. Every year more than 200 researchers are active in the cleanroom.

It is a facility within Myfab, the Swedish Research Infrastructure for Micro and Nano Fabrication, located in Gothenburg, Stockholm, Uppsala and Lund. It offers distributed high-quality cleanroom facilities and associated expertise for advanced research and education to researchers and product developers at universities and high tech industries. Here you get access to the best equipment you can find in Sweden, to give your research and technical development the possibilities it deserve.

Two strategic focus areas in the NFL cleanroom are within quantum devices and microwave/photonic devices. Both rely on our strength and strong heritage within nanoscale lithography.
The Microwave and Photonics Processing Line encompasses a complete set of process tools from material growth to packaging where either access is limited to microwave or photonic devices or where only approved processes can be run. The Line supports complex fabrication of high-quality III-V components with fairly large number of mask layers, such as transistors, varactors and lasers. In a similar way the Quantum Device Line supports fabrication of state-of-the-art quantum devices such as single electron transistors and qubits. Besides these, very strong research activities in materials science (Graphene, Plasmonics, Microfluidics, Energy harvesting, etc, etc) use the cleanroom.
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Publishing date: 24 January 2020 14:18