2D-EPL Workshop
Exploring the impact of processes on device operation
A major challenge in using 2D-materials is linked to the impact of the environment on its properties. These effects are mitigated by careful material and process selection. The transition from lab–to–fab is enabled by setting up dedicated tools and processes. Gaining insights on the source of process variations and their impact on the variability of device parameters is key to making the right choices in the set-up of pilot-line processes.
This edition of the 2D-EPL's Pioneering 2D Materials for the Semiconductor Industry workshop series was held in person at Graphene Week 2023 in Gothenburg, Sweden. Graphene Week is the Graphene Flagship's annual conference and Europe's leading conference on graphene and 2D materials, and this was the 18th edition!
Speakers
Inge Asselberghs
2D-EPL Director, imec
Miika Soikkeli
VTT
Quentin Smets
IMEC
Vina Faramarzi
ASML
Amaia Zurutuza
Graphenea
Gordon Rinke
AMO
Mindaugas Lukosius
iHP
Michael Heuken
AIXTRON
Pierre Morin
imec
Vina Faramarzi
Title: Extreme Ultraviolet Lithography for CMOS integration of 2D-FETs