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2D-PL multi-project wafer run 1


EU Funded

Graphenea

Graphenea leverages the unique properties of graphene to allow prototyping and developing graphene-based solid-state biosensing devices for liquid samples measurements. At only one atom thick, graphene behaves unlike any conventional semiconductor: it supports device physics that silicon, germanium and other compound materials cannot reach.

Graphenea builds its graphene devices with the same wafer-scale manufacturing techniques used across the semiconductor industry. Two things follow from owning the fabrication process end-to-end. First, Graphenea can guarantee performance metrics on every run, so devices arrive meeting the customer's specification rather than a best effort. Second, because the manufacturing cycle is so much shorter than silicon's, it draws far less water, uses fewer process gases, and consumes less of the other chemicals and materials a longer process would require – which adds up to a meaningfully smaller carbon footprint per device.

More details on the PDK can be found here.

KEY BENEFITS

  • Versatile process flows to produce different devices
  • Guaranteed performance
  • Low cost

Key features:

  • 2-, 3- and 4- terminal devices architectures
  • Carrier mobility typically above 1000 cm2/V·s
  • Minimum feature size (CD) ≈10µm, for both the graphene and the metal layers
  • Resistors, capacitors and field-effect transistors, available as a ready-made device librar

PRICE

  • 1800€ for 4cm2
  • 900€ per additional cm2
  • 50% discount is available through the 2D-PL support programme

IMPORTANT DATES

If you are interested in any of our capabilities, please contact us at 2DPL@graphene-flagship.eu. Whether you are exploring a new concept or have a specific process in mind, our team can help assess your project's feasibility, discuss technical requirements, and identify the most appropriate fabrication route.

ACCESS

Both the PDK and the fabrication services are enabled following the signature of the Graphenea Non-Disclosure Agreement (NDA). The PDK is available free of charge to interested parties. For more information or to request access to the services, please contact 2DPL@graphene-flagship.eu.

 

2D-PL icon This run is now closed

This MPW run is tailored for liquid sample measurements, offering features particularly suited for biosensing and liquid biopsies. The passivated contacts prevent large leakage currents and device degradation upon contact with the liquid analyte, enabling measurements in saline solutions, as well as biological fluids like blood, plasma, saliva, and sweat.

Transistors
CVD-graphene gated
through substrate
Ambipolar FET
p-type at VG=0
Width, Length = custom (CD = 10µm)
Resistors
CVD-graphene
p-type, 1kOhm/sq
Width, Length = custom (CD = 10µm)
Substrate
SiO2/Si
 
SiO2=90nm
Si=525µm
Metal contacts
Au
 
CD=10µm
Thickness = 50nm
Encapsulation
Al2O3
 
CD=10µm
Thickness = 30nm
Via opening
   
CD=10µm
QC
Carrier transport
In PCM dies
Mobility >1000cm2/V·s
Dirac Point<20V
Hysteresis<10V
 
Raman
In PCM dies
Raman
· I(G)/I(2D) < 1.25
· I(D)/I(G) < 0.15
· Pos(G) < 1600 cm-1
· FWHM(2D) < 45 cm-1
 
Optical
In PCM dies
Channel integrity > 95%
Device yield within die > 75%
wafer production

Reduced fees

The 2D-PL Support Programme lowers the obstacles for researchers and companies wanting to join our multi-project wafer (MPW) runs. Selected participants can receive a reduction of up to 50% off the MPW fee in exchange for providing feedback on the received devices in the form of a short interview with the hosting pilot line. Your feedback helps us improve future runs. 

2D-PL support programme
Graphenea

About Graphenea Semiconductors

Graphenea, a technology company founded in 2010, is a world leading graphene producer. The 25 employees in Graphenea work on contributing to the successful development of graphene applications of our customers, in a wide range of sectors and in more than 60 countries in the world. Through research and innovation, we support our customers with our portfolio consisting of: CVD Graphene films, Graphene Field-Effect-Transistors chips (GFETs), Graphene Foundry Services (GFAB) and Graphene Oxides. Graphenea’s facilities are located in Spain (San Sebastián) and USA (Boston).

Learn more