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2D-PL multi-project wafer run 2


EU Funded

IHP – Leibniz Institute for High Performance Microelectronics, focuses on the development of graphene photonic integrated circuits (PIC) in a 200 mm pilot line. This involves exploring various integration aspects for the realisation of integrated devices. The process flow is based on graphene photonic module on 200 mm Si wafers and enables a fabrication of proof-of-concept devices like graphene electro-absorption modulators, Mach-Zehnder interferometers or micro ring resonators. Design rules will include the basic design elements to be used in this particular e-MPW run.

KEY BENEFITS
  • Graphene-based PICs combined with embedded SiN waveguides
  • Testing of diverse components for advanced high-speed communication, optical computing, etc. systems.
  • Device designs can be adapted within defined process specifications for photonic and graphene modules.
KEY FEATURES
  • Fabrication of Graphene photonic devices in 200 mm BiCMOS pilot line with tailored processes
  • Preliminary device libraries including waveguide, grating coupler, modulator performances
SCHEDULE
  • 11 June 2025: Call opens for applications, Design rules available
  • 29 September 2025: Area registration deadline
  • 13 October 2025: Layout (.gds) submission deadline
  • October 2025 – April 2026: e-MPW run

PRICING

  • 8000 € fixed entry price
  • 300 €/mm2 for the industry customers and 200 €/mm2 for academic customers
  • 10 dies will be delivered by default

 Learn more and apply

IHP

About IHP

IHP focuses on research and development in the field of microelectronics and information technology, in particular on the promotion of silicon-based high technologies to strengthen microelectronic research and industry in Germany and Europe. The spectrum of research work ranges from innovative materials to complex systems, e.g. for communication, which is a unique selling point in the research landscape. IHP covers the entire R&D value chain, from basic research to the manufacturing of prototypes and small series. The basis for IHP's capabilities is the institute's own continuously (24/7) operated pilot line with its qualified 0.25/0.13 µm SiGe BiCMOS technologies.

Currently, graphene, with its potential for functional extension of Si technology, is one of the research fields at IHP. The research includes material synthesis on 200 mm wafers in the IHP’s cleanroom and development of technological processes for graphene device fabrication in a 200 mm pilot line.

Learn more