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Pioneering 2D Materials for semiconductor industry

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Free virtual event
10 June 2021
  • Free virtual event
  • 10 June 2021

Wafer Level Single Crystalline 2D Materials


One of the biggest challenges the 2D materials faces to be adopted by this industry is the growth of material with a similar stability, reliability and defect density. In this workshop we addressed and discussed these growth challenges.

Keynote speakers

Stephan Hofmann
Cambridge University

Stephan Hofmann


Professor of Nanotechnology at the Dept. of Engineering at Cambridge University.

Hiroki Ago
Kyushu University

Hiroki Ago


Professor at the Global Innovation Center, Kyushu University, in Fukuoka, Japan.

Cedric Huyghebaert
imec

Cedric Huyghebaert


Research Manager Nano Applications Material Engineering at imec

Sanna Arpiainen
VTT

Sanna Arpiainen


Principal Scientist, Team Leader, VTT (Event Chair)

Amaia Zurutuza
Graphenea

Amaia Zurutuza


Scientific Director at Graphenea (Moderator)

About the workshop

One of the key success factors for the phenomenal rise of the semiconductor industry is the production of Si wafers with a defect density of roughly one defect over 10^14 Si atoms. This extremely low defect density provides the industry with a reliable, reproducible and stable material to build the most advanced devices. One of the biggest challenges the 2D materials faces to be adopted by this industry is the growth of material with a similar stability, reliability and defect density. In this workshop we addressed and discussed these growth challenges.

Agenda

11:00 - 11:15 | Cedric Huyghebaert

2D Experimental Pilot Line update

11:15 - 11:55 | Hiroki Ago

Controlled CVD Growth of High-Quality 2D Layered Materials for Electronic and Photonic Applications

The development of graphene research has opened the new field of atomically thin, 2D layered materials. For realizing various applications including high-performance electronic and photonic devices, it is very important to establish synthesis methods of high-quality, large-area 2D materials. We have been studying chemical vapor deposition (CVD) growth of monolayer and bilayer graphene and other related 2D materials, such as and hexagonal boron nitride (hBN) and transition metal dichalcogenides (TMDCs), with the main focus on the understanding of growth mechanisms as well as the growth of high-quality 2D films for advanced applications. In this talk, I will review our recent work on the highly controlled CVD growth and modifications of graphene, h-BN, and their heterostructures.

11:55 - 12:25 | Stephan Hofmann

On the Fundamental Mechanisms that underpin Process Technology for Atomically Thin 2D Films

We systematically adapt in-operando metrology to understand the mechanisms that govern the growth, interfaces and device behaviour of 2D materials at the monolayer limit in realistic process environments, in order to accelerate their development cycles as scalable industrial materials particularly via chemical vapour deposition. The talk will focus on our recent results on graphene, hBN and WS2, highlighting the interdisciplinarity this comprises, ranging from metallurgy and new approaches to epitaxial metal growth to defect characterization by multi-dimensional super-resolution microscopy, machine-learning assisted materials discovery and new quality monitoring approaches at commercial scale.

12:25 - 12:55 | Panel Discussion

Growth challenges for the community and industry.
Moderator: Amaia Zurutuza

12:55 - 13:00 | Closure