Pioneering 2D Materials for Semiconductor Industry
Integration of 2D materials into photonic platforms
This workshop, hosted by the Graphene Flagship's 2D-EPL and its partner AMO, will the examine the integration of 2D materials into photonic platforms. This free hybrid event will take place in Aachen, Germany as part of the two-day Integration of novel materials into silicon photonics workshop and be live streamed to digital attendees.
Speakers and panellists
Dries Van Thourhout received a degree in physical engineering and a Ph.D. degree from Ghent University, Ghent, Belgium in 1995 and 2000 respectively.
From Oct. 2000 to Sep. 2002 he was with Lucent Technologies, Bell Laboratories, New Jersey, USA, working on the design, processing and characterization of InP/InGaAsP monolithically integrated devices. In Oct. 2002 he joined the Department of Information Technology (INTEC), Ghent University, Belgium. Currently he is member of the permanent staff of the photonics group. Since 2008 he has a position as full time professor. He is lecturer for 5 courses within the Ghent University (Microphotonics, Advanced Photonics Laboratory, Photonic Semiconductor Components and Technology, Advanced Electronic and Photonic Devices). He is coordinating the cleanroom activities of the research group and coordinator of the NAMIFAB centre of expertise.
His research focuses on the design, fabrication and characterisation of integrated photonic devices. Main topics involve Silicon nanophotonic devices and the integration of novel materials (III-V, graphene, ferro-electrics, quantum dots, ...) on these waveguides to expand their functionality. He is working on applications for telecom, datacom, optical interconnect and sensing.
He has submitted 14 patents, has authored and coauthored over 270 journal papers (see below) and has presented invited papers at all major conferences in the domain. He is member of the IEEE Photonics Society, SPIE and OSA (fellow). He has coordinated several European Projects (FP6 PICMOS, FP7 WADIMOS, FP7 SMARTFIBER), contributed in many more and received both an ERC Starting Grant (ULPPIC) and ERC Advanced Grant (NARIOS). He received the prestigious "Laureaat van de Vlaamse Academie Van Belgie" prize in 2012 and was a Clarivate highly cited researcher.
Mindaugas Lukošius received M.Sc. degree in Inorganic Chemistry in 2006 from the University of Vilnius, Lithuania. The PhD degree in Chemistry was obtained from the Carl von Ossietzky University Oldenburg, Germany in 2010, in the field of CVD depositions and developments of high-k MIM capacitors. In 2015 he joined the Graphene research group and since 2018 he is leading the 2D materials team in the Materials Research department at IHP and focuses on the development and integration of novel graphene modules into the BiCMOS pilot line.
Steven J. Koester is the Russell J. Penrose Professor of Nanotechnology at the University of Minnesota, and the Director of the Minnesota Nano Center. He received the Ph.D. in 1995 from the University of California, Santa Barbara. From 1997 to 2010, he was a research staff member at the IBM T. J. Watson Research Center and performed research on a wide variety of electronic and optoelectronic devices, with an emphasis on those utilizing the Si/SiGe material system. From 2006 to 2010 he served as manager of Exploratory Technology at IBM Research where his team investigated advanced device and integration concepts for use in future generations of CMOS technology. Since 2010, Dr. Koester has been a Professor of Electrical & Computer Engineering at the University of Minnesota where his research focuses on novel electronic, photonic, spintronic and sensing device concepts with an emphasis on graphene and other 2D materials. Dr. Koester has authored or co-authored over 300 technical publications and conference presentations, 7 volumes, 4 book chapters, and holds 73 United States patents. He is a Fellow of the IEEE and Optica.
Keynote: Integration of graphene and 2D-materials on Si and SiN Photonic ICs
Dries Van Thourhout, IMEC & Ghent University
In this talk, I will review our recent work on hybrid graphene-Si waveguide modulators and compare with state-of-the-art. The talk will cover both lab-processed devices and devices processed in a 300mm CMOS-pilot line, which demonstrate the scalability of the 2D-materials based optoelectronic devices. In an outlook section I will also discuss alternative applications in non-linear optics and advanced lasers.
Towards the integration of Graphene modulators into the CMOS pilot line
Mindaugas Lukošius, IHP
Thanks to its unique electronic band structure, graphene has a great potential to extend the functionalities of a large variety of devices. Despite the significant progress in the fabrication of various graphene based microelectronic devices, the integration of graphene devices still lack the stability and compatibility with Si-technology processes. Therefore, the investigation and preparation of graphene devices in conditions resembling as close as possible the Si technology environment is of highest importance. Towards this goal, this work focuses on the full spectra of graphene research aspects in 200mm pilot line. The insights into processes of graphene modulator fabrication in a 200mm wafer pilot line will be presented.