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2D-EPL multi-project wafer run 6

EU Funded

The 2D-EPL project is launching its sixth multi-project wafer (MPW) run where universities, research institutes and companies can include their designs as dies on joint wafers. This run, provided by Graphenea Semiconductors, provides a flexible platform into which we can implement three different types of devices within one process flow. Applications can range from general electronics and sensing to optoelectronics.

Why apply?

  • Versatile process flow
  • 2 terminal devices, with or without encapsulation.
  • 3 terminal backgated devices with or without encapsulation:
    • Suitable for QD sensitisation
    • Hybrid biosensors with liquid gating and back gating
  • 4 terminal devices:
    • Gas sensors with local heaters
  • HfOx dielectrics: large capacitive coupling for low voltage operation
  • Short turnaround times: <3 months from tape out
  • Direct communication channels. Feasibility studies, consulting.

Important Dates

  • April 2024: Call open, see specifications below
  • 30 June 2024: Call closes, PDK available
  • 15 July 2024: Design freeze​, mask tape out
  • 1 September 2024: MPW run delivery target


  • 3900€ for 4 cm2 (4x 1x1cm2 dies or 16x 5x5mm2 dies)

This run is now closed

Full process details for MPW run 6

Full process details

Backgate metal: Ti/Au 5/15

Backgate dielectric: HfOx 20nm

Graphene: CVD grown >97% monolayer

Metal S/D contact: Au 50nm

Passivation dielectric: AlOx 50nm

Graphenea Foundry Design Rules

Comprehensive set of Design Rules for device design on .gds format files

Examples Device A

Images left to right: a) 4 terminal devices with local heaters and passivated electrodes (5x magnification); b) 3 terminal devices with local gates and passivated electrodes (5x magnification); c) 3 terminal devices with local heaters and passivated electrodes (20x magnification).


About Graphenea Semiconductors

Graphenea, a technology company founded in 2010, is a world leading graphene producer. The 25 employees in Graphenea work on contributing to the successful development of graphene applications of our customers, in a wide range of sectors and in more than 60 countries in the world. Through research and innovation, we support our customers with our portfolio consisting of: CVD Graphene films, Graphene Field-Effect-Transistors chips (GFETs), Graphene Foundry Services (GFAB) and Graphene Oxides. Graphenea’s facilities are located in Spain (San Sebastián) and USA (Boston).

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