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Multi project wafer runs

EU Funded

The 2D Pilot Line (2D-PL) is a Graphene Flagship project created to address the challenges of establishing reliable fabrication processes for high-volume production of graphene- and TMDC-based electronics, photonics and sensors. Part of this process is the development of multi-project wafer (MPW) runs in which customer designs are included as dies on joint wafers.

The 2D-PL plans several MPW wafer runs distributed over four years. Graphenea (GSEMI) and AMO are focusing on graphene based services for sensors and electronics. AMO will also offer a TMDC run. VTT is preparing to extend the offer with CMOS integration for graphene and TMDC. Graphene photonics runs are covered by IHP and VTT. Imec is preparing for process services on 300 mm wafers. The offerings will also be communicated through EUROPRACTICE’s established platform.

2D-PL Multi Project Wafer runs

Run 1 - OPEN

This MPW run by Graphenea Semiconductors is tailored for liquid sample measurements, offering features particularly suited for biosensing and liquid biopsies. The passivated contacts prevent large leakage currents and device degradation upon contact with the liquid analyte, enabling measurements in saline solutions, as well as biological fluids like blood, plasma, saliva, and sweat.

Run 2 - OPEN

In this run, IHP – Leibniz Institute for High Performance Microelectronics, focuses on the development of graphene photonic integrated circuits (PIC) in a 200 mm pilot line. This involves exploring various integration aspects for the realisation of integrated devices. The process flow is based on graphene photonic module on 200 mm Si wafers and enables a fabrication of proof-of-concept devices. 

Run 3 - OPEN

In this MPW run, VTT uses commercially available Si CMOS readout wafers and standard semiconductor manufacturing techniques to produce CMOS integrated graphene-based devices at the wafer scale. The process flow enables graphene-based devices such as Field Effect transistors, resistors, and capacitors connected to the Si CMOS readout circuitry. 

2D-EPL Multi Project Wafer runs

Run 6 - CLOSED

The sixth MPW run, provided by Graphenea Semiconductors, provides a flexible platform into which we can implement three different types of devices within one process flow. Applications can range from general electronics and sensing to optoelectronics. The call will open in March.

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Run 5 - CLOSED

The fifth MPW run will be carried out by IHP in 2024, and will be based on graphene photonic module on 200 mm Si wafers. The Si wafers will include integrated waveguide structures and well as graphene modules for the fabrication of various graphene based photonic devices. Design rules will include the basic design elements to be used in this particular e-MPW run.

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Run 4 - CLOSED

The fourth MPW run will be delivered by VTT Ltd by October 2024 (call closed September 2023), and is based on graphene sensor devices on silicon CMOS wafers. The CMOS readout wafer utilises a commercial Si CMOS process from XFAB. The CMOS design options include usage of customer designs, existing VTT designs and VTT design services. The graphene sensor post-processing utilises process modules developed in the 2D-EPL project.

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Run 3 - CLOSED

The third run will be delivered by AMO GmbH between December 2023 and January 2024 (call closed in June 2023), and is mainly intended towards electronics but can also include sensor devices (e.g. Hall sensor, but via opening on graphene is not in the scope of this run) and will be provided by AMO GmbH. The design of the device can be adjusted within the specifications. 

Run 2 - CLOSED

Like the first, the second MPW run was mainly intended for graphene sensors, and was delivered by VTT Ltd in June 2023 (call closed October 2022).

Run 1 - CLOSED

The first MPW run was mainly intended for graphene sensors and will provide the 2D-EPL an opportunity to prepare for more complex co-integrated runs later in the project. It was delivered by AMO GmbH on October 2022 (call closed in June 2022). 

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